High-performance Topology Scanning
Equipped with the unique high-performance T-scan units , which offer very high scan speeds due to much higher data sampling rates of up to 380 kHz TopoGetter series systems represent the leading topology scanning solutions worldwide.
As with the Standard Topology Scan Units surfaces with 3-dimensional structures can be
measured at very high resolutions down to topological structures of only nanometers.
Other High-performance T-scan head key performance features include:
•Scan resolution in x/y-direction up to *) 2,000 lines/cm ( approx. 5,000 dpi)
•Up to 2 µm position accuracy of scan head
•Measuring quantization of 32,768 steps in vertical (z)-direction in 16 bit data format
•Choice of optics for measuring ranges is 1 to 10 mm
•High scan speed due to up to 380 kHz measurement data sampling rates.
•Ultra high scan speeds due to multi beam simultaneous sampling.
•Automatic layer scan option for objects of various heights
•Maximum measuring range in multiple layers: 50 mm
•Maximum high of scan objects 120 mm
*) Because of constraints due to the image file format TIFF, the highest scan resolution may only be available for a smaller than the maximum scan area.